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Inertial sensors
MEMS
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Micro Structure Workshop MSW '02
Bålsta, Sweden, March 20-21, 2002
General impressions
Invited speakers
Program March 20
Program March 21
Program Posters and Exhibitors
Next MSW will be held in early 2004. You are very welcome to attend.
If you have questions, do not hesitate to contact us.
General impressions MSW '02
The feedback from the 110 attendees was very positive. The spirit of the workshop was well caught by the biweekly newspaper Elektronik i Norden. You can view their article if you left-click and download it if you right-click on the following links (courtesy of Elektronik i Norden):
Impressions of MSW '02 (high resolution - 2.4 MB)
Impressions of MSW '02 (low resolution - 148 kB)
To read these PDF-files you will need Acrobat Reader 3.0 (or higher) that can be downloaded free of charge from Adobe.
Invited Speakers MSW '02
Helmut Seidel is a leading international expert on MEMS and MST. He pioneered on anisotropic etching already in the early 80th, and initiated an MST activity for aerospace applications at the company Messer-schmitt-Bölkow-Blohm in 1986. In 1989 he shifted to automotive applications when Daimler-Benz acquired MBB. Thereafter he moved to Temic (then part of the Daimler-Chrysler group; today owned to 60% by Continental and renamed Conti Temic microelectronic GmbH) in 1996 to focus on the industrialization and high volume production of micro-sensors.
Ari Lehto is a key person behind industrial and academic MEMS in Finland. He is currently the research director at Espoo-Vantaa Institute of Technology where he is responsible for the development of R&D. An important project he initiated and is responsible for is a learning factory in collaboration with Finish industry.
Anders Larsen is the Nordic representative of Yole Development, a French company focused at carrying out marketing surveys, business plans and promotional actions to benefit industrial enterprises and start-ups that have a strong technological content. Anders is also part time active in the Mikroelektronic Centret, MIC, at the Technical University of Denmark where he is involved in, for example, issues related to stimulating start-up companies.
Björn Ekström is Vice President and Chief Technology Officer at Pyrosequencing AB, a company focused on complete solutions for applied genetic analysis. He has extensive experience from biotechnology product development and exploratory research at Pyrosequencing and Amersham Pharmacia Biotech AB.
Preliminary Program MSW '02
The distributed paper version of the final program (177 kB) can be viewed directly (left-click above link) or downloaded (right-click above link). The program is also available below:
March 20
March 21
Posters and Exhibitors
MARCH 20, 2002
| 8.30-9.15 | Registration | |
| 9.15 | Welcome and opening of the workshop | Jan Söderkvist1, Pelle Rangsten2, Patrik Hollman3 (1Colibri Pro Development AB, 2Silex Microsystems AB, 3Åmic AB) |
A1 | 9.30 | INVITED: Microsystems in automotive applications | Helmut Seidel (Conti Temic microelectronic GmbH, Germany) |
A2 | 10.10 | Silicon sensors for high pressure and high temperature applications | Martin Nese (PreSens A/S) |
| 10.30 | Coffee | |
A3 | 11.00 | INVITED: MIC start-ups − current and future business models of commercialization of research | Anders Larsen (Yole Development & MIC) |
A4 | 11.40 | Microsystems in wireless communication | Anders Olsson (Acreo AB) |
A5 | 11.55 | 3-D micromachined devices based on the polymer V-grove (PVG) technology | Thorbjörn Ebefors1,2, Edvard Kälvesten2, Göran Stemme1 (1KTH, 2Silex) |
| 12.10 | Poster presentations | See bottom of this document for list of posters and exhibitors |
| 12.40 | Lunch | |
A6 | 13.50 | Microsystem activities in Oslo | Liv Furuberg (SINTEF-Oslo) |
A7 | 14.10 | Acreo − a presentation | Anders Olsson (Acreo AB) |
A8 | 14.25 | Imego a research institute − in step with the times | Gert Andersson (Imego AB) |
A9 | 14.40 | Summit − The VINNOVA Competence Center of Surface and Microstructure Technology | Klas Hjort (UU) |
A10 | 14.55 | Design and development support − a look behind the scene | Jari Hyvärinen1, Jan Söderkvist2 (1Anker-Zemer Engineering AB, 2Colibri Pro Development AB) |
| 15.15 | Coffee and poster session | |
A11 | 15.45 | INVITED: Electronics manufacturing learning factory | Ari Lehto (Espoo-Vantaa Institute of Technology) |
A12 | 16.15 | Microglow: A microsystems laboratory course | Sami Franssila, Ilkka Tittonen, Kestutis Grigoras, Tuuli Juvonen, Kaisa Nera, Paula Heikkilä (HUT) |
A13 | 16.30 | Increasing interest for MEMS in telecommunication | Katarina Boustedt1, Kåre Gustafsson2 (1Ericsson Mobile Communications AB, 2Ericsson Radio Systems AB) |
A14 | 16.50 | Summary of who are active in the Nordic region + MSx update | Jan Söderkvist (Colibri Pro Development AB) |
| 17.05 | Discussion on Nordic MEMS strategies and support | |
| 18.30 | Dinner | |
MARCH 21, 2002
B1 | 8.50 | Cleanroom and vibration control for MEMS manufacturing | Romain Haettel (ABB Airtech) |
B2 | 9.10 | Quartz direct bonding for increased resonator stability | Örjan Vallin (UU) |
B3 | 9.25 | Double sided bulk micromachining of SOI films using room temperature oxygen plasma assisted bonding | Anke Sanz-Velasco1, Henrik Rödjegård2, Gert I. Andersson2 (1CTH, 2Imego AB) |
B4 | 9.40 | Electrospray ionization mass spectrometry using a plastic chip | Malin Svedberg, Fredrik Nikolajeff (UU) |
B5 | 9.55 | Micromechanics in <111> silicon | Tuuli Juvonen, Jenny Poulsen, Sami Franssila (HUT) |
| 10.10 | Coffee and poster session | |
B6 | 10.40 | INVITED: Microsystem in biotechnology − a commercial perspective | Björn Ekström (Pyrosequensing AB) |
B7 | 11.10 | Microfluidic devices for biotechnology | Aman Russom, Wouter van der Wijngaart, Helene Andersson, Göran Stemme (KTH) |
B8 | 11.25 | Development of multisite microelectrodes for neuroscience | Maria Kindlundh (Acreo AB) |
| 11.40 | Lunch | |
B9 | 12.55 | Simulation of simultaneous flow, diffusion and reaction | Gunnar Kylberg (Gyros Microlab AB) |
B10 | 13.15 | Piezo-driven inkjet | Mats Ottoson (XaarJet AB) |
B11 | 13.35 | Microdispensing using the compound method | Johan Nilsson, Jonas Bergkvist, Simon Ekström, Thomas Laurell (LTH) |
B12 | 13.50 | Microcombustion / PowerMEMS | Nina Bjerkebo et al (Telemark University College) |
| 14.10 | Coffee and poster session | |
B13 | 14.40 | MOEMS for biochemical application | Fredrik Nikolajeff (UU) |
B14 | 15.00 | Functional testing and calibration of microsystems at wafer level | Mette Brunbjerg Olesen, Jesper Bay, Jens Branebjerg (DELTA Danish Electronics, Light & Acoustics) |
B15 | 15.20 | The design of a bistable micro-switch | Britta Ottosson (Imego AB) |
B16 | 15.35 | Diamond − optic’s best friend | Mikael Karlsson, Fredrik Nikolajeff (UU) |
| 15.50 | Open discussion on prototyping, industrialization, and the steps thereafter | |
| ~16.00 | Closing of workshop | |
POSTERS and EXHIBITORS
P1 | High power Q-switched Nd:YAG laser mounted in a microstructure silicon carrier | Jacob Rydholm, David Evekull, Maria Kindlundh, Stefan Bjurshagen, Leif Kjellberg, Lennart Bäcklin, Ralf Koch, Magnus Olson (Acreo AB) |
P2 | Homogeneous porous layers in high aspect ratio enzyme microreactors improves performance | Martin Bengtsson1, Simon Ekström1, György Marko-Varga2, Thomas Laurell1 (1LTH, 2LU) |
P3 | Injection molded subwavelength gratings as low-cost antireflection surfaces | Fredrik Nikolajeff (UU) |
P4 | Integration of micro-optics with semiconductor lasers | Mikael Karlsson, Fredrik Nikolajeff (UU) |
P5 | Notch mechanics for silicon microstructures | Zhiliang Zhang (SINTEF-Trondheim) |
P6 | Ultraminiaturized leverage beam pressure sensors | Patrik Melvås, Edvard Kälvesten, Göran Stemme (KTH) |
P7 | Spiked biopotential electrodes | Patrick Griss1, Pekka Meriläinen2 (1KTH, 2Datex-Ohmeda) |
P8 | Microcombustion / PowerMEMS | Nina Bjerkebo et al (Telemark University College) |
E1 | Acreo AB | |
E2 | Anker-Zemer Engineering AB | |
E3 | Ericsson Microelectronics AB | |
E4 | Megatel AB | |
E5 | Silex Microsystems AB | |
E6 | Åmic AB | |
E7 | EV Group | |
E8 | Colibri Pro Development AB | |
E9 | Comsol AB | |
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October 19, 2008