Program MSW '02
Uppsala, Sweden, March 20-21, 2002

8.30-9.15

Registration

9.15

Welcome and opening of the workshop

Jan Söderkvist¹, Pelle Rangsten², Patrik Hollman³ (¹Colibri Pro Development AB, ²Silex Microsystems AB, ³Åmic AB)

A1

9.30

INVITED: Microsystems in automotive applications

Helmut Seidel (Conti Temic microelectronic GmbH, Germany)

A2

10.10

Silicon sensors for high pressure and high temperature applications

Martin Nese (PreSens A/S)

10.30

Coffee

A3

11.00

INVITED: MIC start-ups − current and future business models of commercialization of research

Anders Larsen (Yole Development & MIC)

A4

11.40

Microsystems in wireless communication

Anders Olsson (Acreo AB)

A5

11.55

3-D micromachined devices based on the polymer V-grove (PVG) technology

Thorbjörn Ebefors^1,2, Edvard Kälvesten², Göran Stemme¹ (¹KTH, ²Silex)

12.10

Poster presentations

See bottom of this document for list of posters and exhibitors

12.40

Lunch

A6

13.50

Microsystem activities in Oslo

Liv Furuberg (SINTEF-Oslo)

A7

14.10

Acreo − a presentation

Anders Olsson (Acreo AB)

A8

14.25

Imego a research institute − in step with the times

Gert Andersson (Imego AB)

A9

14.40

Summit − The VINNOVA Competence Center of Surface and Microstructure Technology

Klas Hjort (UU)

A10

14.55

Design and development support − a look behind the scene

Jari Hyvärinen¹, Jan Söderkvist² (¹Anker-Zemer Engineering AB, ²Colibri Pro Development AB)

15.15

Coffee and poster session

A11

15.45

INVITED: Electronics manufacturing learning factory

Ari Lehto (Espoo-Vantaa Institute of Technology)

A12

16.15

Microglow: A microsystems laboratory course

Sami Franssila, Ilkka Tittonen, Kestutis Grigoras, Tuuli Juvonen, Kaisa Nera, Paula Heikkilä (HUT)

A13

16.30

Increasing interest for MEMS in telecommunication

Katarina Boustedt¹, Kåre Gustafsson² (¹Ericsson Mobile Communications AB, ²Ericsson Radio Systems AB)

A14

16.50

Summary of who are active in the Nordic region + MSx update

Jan Söderkvist (Colibri Pro Development AB)

17.05

Discussion on Nordic MEMS strategies and support

18.30

Dinner

B1

8.50

Cleanroom and vibration control for MEMS manufacturing

Romain Haettel (ABB Airtech)

B2

9.10

Quartz direct bonding for increased resonator stability

Örjan Vallin (UU)

B3

9.25

Double sided bulk micromachining of SOI films using room temperature oxygen plasma assisted bonding

Anke Sanz-Velasco¹, Henrik Rödjegård², Gert I. Andersson² (¹CTH, ²Imego AB)

B4

9.40

Electrospray ionization mass spectrometry using a plastic chip

Malin Svedberg, Fredrik Nikolajeff (UU)

B5

9.55

Micromechanics in <111> silicon

Tuuli Juvonen, Jenny Poulsen, Sami Franssila (HUT)

10.10

Coffee and poster session

B6

10.40

INVITED: Microsystem in biotechnology − a commercial perspective

Björn Ekström (Pyrosequensing AB)

B7

11.10

Microfluidic devices for biotechnology

Aman Russom, Wouter van der Wijngaart, Helene Andersson, Göran Stemme (KTH)

B8

11.25

Development of multisite microelectrodes for neuroscience

Maria Kindlundh (Acreo AB)

11.40

Lunch

B9

12.55

Simulation of simultaneous flow, diffusion and reaction

Gunnar Kylberg (Gyros Microlab AB)

B10

13.15

Piezo-driven inkjet

Mats Ottoson (XaarJet AB)

B11

13.35

Microdispensing using the compound method

Johan Nilsson, Jonas Bergkvist, Simon Ekström, Thomas Laurell (LTH)

B12

13.50

Microcombustion / PowerMEMS

Nina Bjerkebo et al (Telemark University College)

14.10

Coffee and poster session

B13

14.40

MOEMS for biochemical application

Fredrik Nikolajeff (UU)

B14

15.00

Functional testing and calibration of microsystems at wafer level

Mette Brunbjerg Olesen, Jesper Bay, Jens Branebjerg (DELTA Danish Electronics, Light & Acoustics)

B15

15.20

The design of a bistable micro-switch

Britta Ottosson (Imego AB)

B16

15.35

Diamond − optic’s best friend

Mikael Karlsson, Fredrik Nikolajeff (UU)

15.50

Open discussion on prototyping, industrialization, and the steps thereafter

~16.00

Closing of workshop

P1

High power Q-switched Nd:YAG laser mounted in a microstructure silicon carrier

Jacob Rydholm, David Evekull, Maria Kindlundh, Stefan Bjurshagen, Leif Kjellberg, Lennart Bäcklin, Ralf Koch, Magnus Olson (Acreo AB)

P2

Homogeneous porous layers in high aspect ratio enzyme microreactors improves performance

Martin Bengtsson¹, Simon Ekström¹, György Marko-Varga², Thomas Laurell¹ (¹LTH, ²LU)

P3

Injection molded subwavelength gratings as low-cost antireflection surfaces

Fredrik Nikolajeff (UU)

P4

Integration of micro-optics with semiconductor lasers

Mikael Karlsson, Fredrik Nikolajeff (UU)

P5

Notch mechanics for silicon microstructures

Zhiliang Zhang (SINTEF-Trondheim)

P6

Ultraminiaturized leverage beam pressure sensors

Patrik Melvås, Edvard Kälvesten, Göran Stemme (KTH)

P7

Spiked biopotential electrodes

Patrick Griss¹, Pekka Meriläinen² (¹KTH, ²Datex-Ohmeda)

P8

Microcombustion / PowerMEMS

Nina Bjerkebo et al (Telemark University College)

E1

Acreo AB

E2

Anker-Zemer Engineering AB

E3

Ericsson Microelectronics AB

E4

Megatel AB

E5

Silex Microsystems AB

E6

Åmic AB

E7

EV Group

E8

Colibri Pro Development AB

E9

Comsol AB