MSW '96

The second Micro Structure Workshop, organized by Colibri Pro Development in collaboration with Uppsala University, was held in Uppsala on March 26-27. This year the program was based on the response to the ‘call for papers’. Although most presentations were given by universities and research institutes, their industrial relevance was clearly noticeable.

The purpose of MSW is to aid in stimulating the development of Micro Structure Technology (MST) within the Nordic countries. Bringing together in an informal way those interested in MST forms an important part of MSW. For instance, ample time for discussions between the participants was included in the program. The program also included a poster session to further stimulate contacts between the participants.

The responses from the 81 participants (30 from industry) to the questionnaire were very positive and showed that several new contacts were formed, both on an information basis and on a project basis. This will most likely result in activities to be presented in future issues of MSB.

The program included 23 oral presentations, including presentations given by three invited speakers.

Professor Nico F. de Rooij from IMT in Neuchâtel, Switzerland, gave the keynote presentation. He presented an overview concerning recent advances in micromachining technology, and gave several examples dealing with the design, fabrication and application of microsystems.

Martin Nese, SINTEF, and Per Øhlckers, SensoNor, reported on a collaborative development of technology for silicon micromachined sensors for automotive applications. The development of SensoNor’s new accelerometer SA-30 was highlighted. This sensor is based on a thermally excited resonating silicon beam. SensoNor indicated that future cars could include eleven of their sensors.

Unfortunately, the third invited speaker, Matthias Müllenborn from MIC in Denmark, had to leave during MSW. Congratulations for your new son.

Several presentations were given by centers whose key role is to facilitate and broaden the implementation of these emerging technologies within industry (see also MSB 96:1).

A notable trend is that silicon is beginning to be challenged by other materials, such as quartz. The best material for each application should be chosen.

Did you miss MSW ’96? There is a 135 page long proceeding in English (except four pages that are in Swedish). Next MSW will be held in 1998.