MSW '96
Uppsala, Sweden, March 26-27, 1996

8.30-9.00

Registration

9.00

Introduction

Jan Söderkvist (Colibri Pro Dev. AB)

9.15

Technology and applications of microsystems (Invited)

Nico F. de Rooij (Institute of Microtechnology, University of Neuchâtel, Switzerland)

10.00

Poröst kisel som bärar-matris i kiselintegrerade enzymreaktorer

Johan Drott, Thomas Laurell (Lunds Tekniska Högskola) Lars Rosengren (Uppsala University)

10.25

Break

10.55

Mikrostrukturer tillverkade på kvartsglassubstrat

Peter Norlin, Håkan Elderstig, Lili Forssén, Johan Holm (IMC)

11.20

Polymera mikrostrukturer och replikeringstekniker

Olle Larsson (IMC)

11.45

Elektrodeponeringsprocesser vid mikrostrukturtillverkning

Pelle Rangsten, Ylva Bäcklund (Uppsala University)

12.10

Discussion: Future MST materials

12.20

Lunch

13.20

Wafer bonding for formation of electronic materials and sensor structures

Stefan Bengtsson (Chalmers Tekniska Högskola)

13.45

Strength and stress measurements on MST related thin films by micromechanical techniques

Staffan Greek, Fredric Ericson, Stefan Johansson, Jan-Åke Schweitz (Uppsala University)

14.10

The sensor & microsystem group at Chalmers

Gert Andersson (Chalmers Tekniska Högskola)

14.35

MEMS at S3/KTH

Göran Stemme (KTH)

14.55

Break

15.25

Chalmers KiselDesign

Sten Norrman (Chalmers Tekniska Högskola), Hans Richert (Bofors AB)

15.45

MEMS vid Industriellt Mikroelektronik Centrum

Christian Vieider, Håkan Elderstig, Lili Forssén, Michiel Hamberg, Johan Holm, Wlodek Kaplan, Olle Larsson, Peter Norlin (IMC)

16.10

SUMMIT

Jan-Åke Schweitz (Uppsala University)

16.35

Tour of the Ångström Laboratory

18.00

Dinner and Poster session

Posters and Exhibitors listed alphabetically:
- Colibri Pro Development AB / Micro Structure Bulletin
- Heavy ion induced etch anisotropy in single crystalline quartz
- Industriellt Mikroelektronik Centrum (IMC)
- Low cost NDIR gas sensors
- MecMOS
- Megatel AB / Karl Süss
- Microassembly of a micromotor
- Microfluid device research at KTH
- Micromechanics in quartz
- Microstructure-Biosensors, will they do the job?
- MST at Uppsala University
- Mätning av tunnfilmer med coherence radar / Optac 2000
- On the flow behavior of diffuser/nozzle elements microfabricated in silicon

8.45

Technologies for silicon micromechanical sensors for automotive applications - a development collaboration between SINTEF and SensoNor (Invited)

Martin Nese, Anders Hanneborg (SINTEF), Henrik Jacobsen, Gjermund Kittilsland, Svein M. Nilsen, Per Øhlckers (SensoNor a.s), Norway

9.45

Micromachined vibrating gyroscopes

Jan Söderkvist (Colibri Pro Development AB)

10.10

Discussion: The success of MST in the automotive field, and how can other areas follow.

10.20

Break

10.50

Microstructure-Biosensors, will they do the job?

Christine Berggren Kriz, Dario Kriz (Chemel Research Institute, IDEON)

11.15

A flow-through sample cell with electrostatically controlled sample injection into quartz capillaries

Thomas Laurell, Lars Wallman, Johan Drott, S. Nilsson, Johan Nilsson (Lunds Tekniska Högskola)

11.40

Nerve regeneration through micro machined silicon membranes, a possible way to prosthesis control

Lars Wallman, Johan Drott, Lars Montelius, Thomas Laurell (Lunds Tekniska Högskola), Nils Danielsen (Lunds University)

12.05

Discussion: The MST-development in medical-related areas

12.15

Lunch

13.15

3D laser micromachining (Invited)

Matthias Müllenborn, Siebe Bouwstra (MIC, Denmark)

14.15

Sacrificial metal etching

David Westberg (Chalmers Tekniska Högskola)

14.40

Mikrostrukturering av kvarts genom jonspårsetsning

Greger Thornell, Klas Hjort, Jan-Åke Schweitz (Uppsala University)

15.05

Discussion: Will new process steps conquer industry - possibilities and limiting factors

15.15

Break

15.45

Högpresterande mikroaktuatorer

Stefan Johansson, Mats Bexell, Greger Thornell (Uppsala University)

16.10

Fiber optical precision interconnect techniques

Håkan Elderstig, Stefan Lindgren, Henrik Åhlfeldt, Lennart Bäcklin, Lili Forssén, Olle Larsson, Christian Vieider (IMC)

16.35

From simulation to product

Jan Söderkvist (Colibri Pro Development AB)

ca. 17.00

Closing of Workshop