MSW '98
Uppsala, Sweden, March 24-25, 1998

8.15-9.00

Registration

9.00

Introduction

9.10

Wind, sound, smell, and intrusion detected by micromachined thermal CMOS sensors (Invited)

Henry Baltes, Oliver Brand and Andreas Koll (ETH Zürich, Switzerland)

9.55

Medical applications of microsystems

J. Malcolm Wilkinson and David Hitchings (Technology For Industry Ltd, Great Britain)

10.15

NORMIC - Nordic Microsystems Manufacturing

Stein Ivar Hansen (SensoNor), Edvard Kälvesten (IMC), Joan Bausells (CNM), Ralph W. Bernstein (Sintef), Jaako Salonen (VTT) and Ole Steensen (MIC)

10.35

Break

11.05

Microprocessing - an armchair approach (in Swedish)

Greger Thornell and Stefan Johansson (Uppsala Univ.)

11.30

Bonded wafers for use in MEMS manufacturing

Karin Hermansson and Scott Blackstone (BCO Technologies, Great Britain)

11.50

Research of permanent magnet microfabrication technology and electromagnetic microdevices at Tallinn Technical University

Arvi Kruusing and Vitali Podgurski (Tallinn Technical Univ., Estland) (Uppsala University)

12.10

Three dimensional microstructures based on polyimide joints

Thorbjörn Ebefors, Edvard Kälvesten, Johan Mattsson and Göran Stemme (KTH)

12.30

Lunch

13.30

Novel SPM probes - fabrication and characterization (Invited)

Anja Boisen (MIC, Denmark)

14.20

Creation and development of latent microstructures (in Swedish)

Greger Thornell and Klas Hjort (Uppsala Univ.)

14.40

Further development of an electron tunneling accelerometer

Patrick Scheeper (Brüel & Kjær, Denmark)

15.00

Break

15.30

Micro propulsion thrusters for space applications

Mats Jönsson, Johan Köhler, Kajsa Larsson, Urban Simu (Uppsala Univ.), Lars Stenmark (ACR Electronic)

15.50

A shear mode piezo printhead - manufactured in Sweden

Gerhard Beurer (Modular Ink Technology), Joachim Kretschmer (Pelikan Produktions AG)

16.10

Micro fluidic components in diamond

Henrik Björkman, Pelle Rangsten, Urban Simu, Joakim Karlsson, Patrik Hollman and Klas Hjort (Uppsala Univ.)

16.30

MST at Industrial Microelectronics Center (in Swedish)

Christian Vieider (IMC)

17.00

Poster presentations

17.15

Poster session with refreshments

Posters listed alphabetically:
- Encapsulation of silicon resonant structures
     Corman, Enoksson, Stemme (KTH)
- Fabrication of a micro-electromagnet
     Larsson, Boman (Uppsala Univ.)
- Flow-through piezo-electric picoliter dispenser
     Nilsson, Laurell, Wallman, Nilsson, Johansson (LTH)
- IMC - Industriellt MikroelektronikCentrum
     Vieider et al (IMC)
- Micro Structure Technology at the Ångström Laboratory
     (Uppsala Univ.)
- Optically excited microresonator for force measurements
     Johnsson, Sohlström, Enoksson, Stemme (KTH)
- Packaging of micromachined components
     Rusanen (VTT Electronics, Finland)
- Polymer microactuators for cell biology and nanoliter chemistry
     Jager, Inganäs, Lundström (Linköpings Univ.), Smela (Risø National Lab.)
- Progress update on gyro industrialization
     Söderkvist (Colibri Pro Development)
- Sensors and microsystems at Chalmers
     Malmquist, Weinert, Westberg, Andersson (Chalmers)
- Some recent advances in micromachining technology
     Thornell, Johansson (Uppsala Univ.)
- Tallinn Technical University
     Kruusing et al (Tallinn Technical Univ., Estonia)
- The many faces of MITE
     Thornell et al (Uppsala Univ.)

18.30

Dinner

8.45

Simulations - a tool that opens design possibilities

Jan Söderkvist (Colibri Pro Development)

9.00

Laser to fiber alignment using microstructured silicon carriers

Bernt Sundström (Ericsson Components), Henrik Åhlfeldt, Johan Holm, Stefan Lindgren, Christian Vieider (IMC)

9.20

A large micromachined resonant scanning mirror (in Swedish)

Mattias Vangbo, Staffan Karlsson and Ylva Bäcklund (Uppsala Univ.)

9.40

An optical IR-source and CO2-chamber system for CO2 measurements

Edvard Kälvesten, Thierry Corman, Göran Stemme (KTH), Matti Huiku, Pekka Meriläinen (Datex-Engström, Finland)

10.00

InP based micro opto electro mechanics

Donato Pasquariello, Mikael Karlsson, Staffan Greek and Klas Hjort (Uppsala Univ.)

10.20

Break

10.50

From research lab to MEMS fab: case Vaisala - VTI Hamlin (invited)

Heikki Kuisma (VTI Hamlin Oy, Finland)

11.40

Surface micromachined pressure sensors for cardiovascular pressure measurements

Edvard Kälvesten, Göran Stemme (KTH), Leif Smith, Lars Tenerz (Radi Medical Systems)

12.00

Is the MEMS-commercialization micromachining or system-driven

Jan Söderkvist (Colibri Pro Development)

12.15

Open discussion on industrialization issues

12.25

Lunch

13.25

Lilliputian reflections (in Swedish)

Greger Thornell (Uppsala Univ.)

13.45

A low impedance sensing technique for vibrating structures

Anke Weinert, Mats Berggren and Gert I. Andersson (Chalmers)

14.05

Polymer microactuators for cell biology and nanoliter chemistry

Edwin W. Jager, Olle Inganäs, Ingemar Lundström (Linköpings Univ.), Elisabeth Smela (Risø National Lab.)

14.25

Miniaturized X-ray sources

Leif Smith (Radi Medical Systems)

14.45

Update on Summit and AME

Jan-Åke Schweitz (Uppsala Univ.)

15.15

Break

15.45- ~16.30

Tour of the Ångström Laboratory

Ylva Bäcklund (Uppsala Univ.)