Applications of MEMS

Are we not all fascinated by the craftsmanship of the Swiss watchmakers - creating high precision systems so small that magnifiers are needed during assembly? Today, there is a need for even smaller devices.

MEMS markets
Market forecast made by NEXUS in 1998 (see MSB 98:4)

MEMS involves a multitude of materials and processes. The complexity of MEMS can range from simple mechanical structures to completely miniaturized fluidic multifunctional systems containing actuators, sensors and electronics. MEMS-based components are used in many applications, such as medical, automotive, telecommunication, IT and space. Typical mass-produced examples are:

Accelerometers for airbag systems
Heads for ink jet printers and hard disk drivers
Pressure and chemical sensors for medical applications
Quartz watch crystals resonators for time-keeping

The automotive field was the MEMS leader in the early 1990s. Its importance is less dominating today due to the rapid growth in other MEMS fields. MEMS is now used widely in automobiles in safety, environmental and security areas. The MEMS components consist mainly of sensors used, for instance, for crash detection and engine control. Characteristics of the automotive industry are few suppliers, large quantities, tough cost-pressure, high quality requirements, and harsh environments.

Factors influencing the use of MEMS in healthcare are mainly the drive to reduce costs and the need to prevent faulty diagnosis and treatment. Examples of application include:

Diagnostic and drug delivery systems for clinical and home use (analysis systems, genetic tests, asthmatics, diabetics, blood pressure, etc.)
Prosthesis, artificial organs and muscle stimulation (hearing aids, pacemakers, bladder control, limb function restoration, etc.)
Minimally invasive surgery (sensing and manipulation)

There are several interesting emerging applications that complement the established MEMS applications. Examples include several micro-fluidic systems (drug delivery, lab-on-chip, etc.) and IT-related components (optical switches, magneto optical heads, etc.). Hot research areas are RF-MEMS (IT) and micro-fluidics.

The technology push for MEMS is now complemented by a market pull. Many companies in this multi billion-dollar market are found in the USA and Japan. Dominating in Europe are Germany, France and the UK. A specialized sensor industry based on small to medium-sized companies (SMEs) has evolved. A few large companies in the semiconductor and automotive areas have also invested in their own MST facilities. MEMS is no longer just a research area.

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